Yuji Okamoto

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[21a-233-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:00 AM - 9:15 AM

△ [21a-233-1] Production of Si by reduction of SiCl₄ using remotely supplied hydrogen radical

〇Yuji Okamoto^1,2, Yuya Nakamura^1,2, Yoshikazu Suzuki², Masatomo Sumiya¹ (1.NIMS, 2.Univ. of Tsukuba)