9:00 AM - 9:15 AM
〇Yuji Okamoto1,2, Yuya Nakamura1,2, Yoshikazu Suzuki2, Masatomo Sumiya1 (1.NIMS, 2.Univ. of Tsukuba)
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Fri. Sep 21, 2018 9:00 AM - 12:00 PM 233 (233)
Takashi Noguchi(Univ. of the Ryukyus), Taizoh Sadoh(Kyushu Univ.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
9:00 AM - 9:15 AM
〇Yuji Okamoto1,2, Yuya Nakamura1,2, Yoshikazu Suzuki2, Masatomo Sumiya1 (1.NIMS, 2.Univ. of Tsukuba)
9:15 AM - 9:30 AM
〇Mitsuko Muroi1, Ayami Yamada1, Hitoshi Habuka1 (1.Yokohama Nat. Univ.)
9:30 AM - 9:45 AM
〇Toru Watanabe1, Mai Hong Minh1, Hitoshi Habuka1 (1.Yokohama Nat. Univ.)
9:45 AM - 10:00 AM
〇Asaki Kameda1, Hiroaki Hanafusa1, Seiichiro Higashi1 (1.Graduate School of Advanced Sciences of Matter, Hiroshima Univ.)
10:00 AM - 10:15 AM
〇Toshifumi Imajo1, Kenta Moto1, Ryota Yoshimine1, Takashi Suemasu1, Kaoru Toko1 (1.Univ. of Tsukuba)
10:15 AM - 10:30 AM
〇Muhammad Monirul Islam1, Junji Sawahata2, Katsuhiro Akimoto1, Takeaki Sakurai1 (1.Tsukuba Univ., 2.Ibaraki Tech.College)
10:30 AM - 10:45 AM
Mitsuko Muroi1, 〇Hitoshi Habuka1, Takanori Mikahara2,3, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)
10:45 AM - 11:00 AM
〇Yuuki Ishida1,2, Noriko MIura2, Shinichi Ikeda1,2, Takahiro Ito3, Hitoshi Habuka4, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.ORIENTAL MOTOR, 4.Yokohama Nat. Univ.)
11:00 AM - 11:15 AM
〇Gosuke Yachida1, Yasushi Hoshino1, Jyoji Nakata1 (1.Kanagawa Univ.)
11:15 AM - 11:30 AM
〇Toshinori Takahashi1, Mitsuko Muroi1, Miya Matsuo1, Habuka Hitoshi1, Shinichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama Nat. Univ, 2.MINIMAL, 3.AIST)
11:30 AM - 11:45 AM
〇(M1)Kenta Irikura1, Hitoshi Habuka1 (1.Yokohama Nat. Univ.)
11:45 AM - 12:00 PM
〇Tetsuya Goto1, Seiji Kobayashi2, Yuki Yabuta3, Shigetoshi Sugawa1, Shiro Hara4,5 (1.Tohoku Univ., 2.Kotec, 3.Seinan Industries, 4.AIST, 5.MINIMAL)
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