Toshinori Takahashi

→ Search for Toshinori Takahashi in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[21a-233-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:15 AM - 11:30 AM

[21a-233-10] Increasing silicon epitaxial growth rate for minimal CVD reactor

〇Toshinori Takahashi¹, Mitsuko Muroi¹, Miya Matsuo¹, Habuka Hitoshi¹, Shinichi Ikeda^2,3, Yuuki Ishida^2,3, Shiro Hara^2,3 (1.Yokohama Nat. Univ, 2.MINIMAL, 3.AIST)

▲