Mitsuko Muroi

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[21a-233-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:15 AM - 9:30 AM

[21a-233-2] Method for increasing the growth rate of silicon thin film by SiH₂Cl₂-SiH_x-H₂system

〇Mitsuko Muroi¹, Ayami Yamada¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)