Yuuki Ishida

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[21a-233-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:45 AM - 11:00 AM

[21a-233-8] Characterization of the minimal CVD tool in the hydrodynamic point of view II

〇Yuuki Ishida^1,2, Noriko MIura², Shinichi Ikeda^1,2, Takahiro Ito³, Hitoshi Habuka⁴, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.ORIENTAL MOTOR, 4.Yokohama Nat. Univ.)

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