5:00 PM - 5:15 PM
△ [21p-146-14] Quality Improvement and Suppression of Cracking for High-Temperature Annealed AlN Films
〇Kenjiro Uesugi1, Yusuke Hayashi2, Kanako Shojiki3, Kentaro Nagamatsu1, Harumasa Yoshida1, Hideto Miyake2,3 (1.OPRI, Mie Univ., 2.Grad. School of RIS, Mie Univ., 3.Grad. School of Eng., Mie Univ.)