Kazuhiro Koga

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 1:00 PM - 4:45 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[21p-233-1~14] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 1:45 PM

[21p-233-3] TiN-Gate SOI CMOS Fabricated by minimal fab

〇Kazuhiro Koga¹, Y. X. Liu², Fumito Imura^1,2, Masashi Kase², Shuichi Noda², Kazumasa Nemoto², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)

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