The 79th JSAP Autumn Meeting, 2018

Seiichiro Higashi

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Chairperson, etc.

Thu. Sep 20, 2018 9:30 AM - 11:45 AM 233 (233)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-233-1~9] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.)