Mitsuhiro Omura

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Chairperson, etc.

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Kenji Ishikawa(Nagoya Univ.), Mitsuhiro Omura(Toshiba Memory)