[18a-233-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

△ [18a-233-10] UV-irradiation time dependence of red fluorescence emitted from Legionella

〇Sawako Tanaka¹, Syuhei Onishi¹, Makoto Ishida¹, Kazuaki Sawada¹, Hiromu Ishii¹, Katsuyuki Machida², Yasuhiko Nikaido³, Mitsumasa Saito³, Shinichi Yoshida⁴ (1.Toyohashi Univ. of Technology, 2.Tokyo Institute of Technology, 3.Univ. of Occupational and Environmental Health, 4.Fukuoka Megumi Hospital)

Keywords:semiconductor, Legionella