10:30 AM - 10:45 AM
[18a-233-5] MEMS Rogowski Coil with TSV Structure for Overcurrent Detection
Keywords:Rogowski Coil, MEMS, TSV
We have fabricated the MEMS Rogowski coil with TSV structure for overcurrent detection in power device. The Rogowski coil having a spiral coil with a chip size of 10 × 10 × 0.3 mm 3 , TSV diameter of 100 µm, 137 turns was fabricated by MEMS process, and it was confirmed that current detection was possible.