10:45 AM - 11:00 AM
△ [18a-233-6] A Study on Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating for MEMS Accelerometers
Keywords:MEMS, Gold, young's modulus
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Tue. Sep 18, 2018 9:30 AM - 12:00 PM 233 (233)
Masato Sone(Tokyo Tech)
10:45 AM - 11:00 AM
Keywords:MEMS, Gold, young's modulus