[18p-PB3-1~95] 17 Nanocarbon Technology (Poster)

[18p-PB3-77] Gas Source CVD of WS₂ Monolayer using WOCl₄ as Precursor

〇Yoshiki Sakuma¹, Naoki Ikeda¹, Akihiro Ohtake¹, Takaaki Mano¹ (1.NIMS)

Keywords:Transition metal dichalcogenide, WS2, CVD