10:15 AM - 10:30 AM
[19a-224A-4] 【Highlighted Presentation】Fabrication of γ-Al2O3/Ga2O3 superlattices
Keywords:Ga2O3, superlattice
The γ-Ga2O3, one of the metal oxide crystalline polymorphism, has been reported epitaxial stabilization on the Mg Al2O4 substrate. Moreover, it is reported that γ (AlxGa1-x) 2O3 is capable of full-rate solid solution. However, there are no reports on hetero junctions. Then, the first γ-Al2O3/Ga2O3 superlattice was fabricated.