Thermodynamic Analysis of Ga<sub>2</sub>O<sub>3</sub> Growth by Metalorganic Vapor Phase Epitaxy

Presentation information

Oral presentation

21 Joint Session K » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Wed. Sep 19, 2018 9:30 AM - 11:30 AM 224A (224-1)

10:45 AM - 11:00 AM

〇Sakiko Yamanobe¹, Kento Yoshida¹, Keita Konishi¹, Yoshinao Kumagai^1,2 (1.Tokyo Univ. of Agri. & Tech., 2.TUAT GIR)

Keywords:Ga2O3, MOVPE