[19a-233-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-233-9] Single Crystalline Silicon Floating Gate Memory Fabrication on Plastic Substrate Using Meniscus Force-Mediated Layer Transfer of SOI Layer with Midair Cavity

〇(M2)Fumiyasu Kondo¹, Higashi Seiichiro¹ (1.Graduate School of Advanced Sciences of Matter, Hiroshima Univ)

Keywords:flexible electronics