[20a-437-1~11] 8.3 Plasma nanotechnology

△ [20a-437-5] Synthesis of core-shell particles using a magnetron sputtering
and a capacitively-coupled plasma

〇Hiroshi Koyama¹, Kazuo Takahashi², Koichi Sasaki¹ (1.Hokkaido Univ, 2.Kyoto Inst of Tech)

Keywords:plasma, nano particle

In this experiment,we use new method which make Core-Shell particle by using plasma.
We make Core-Shell particle in the way which trap liquid nano particle in RF plasma and coat it by plasma CVD.
This Core-shell particles have special constraction, for example it have vacancy between Shell and Core by volume change occur when liquid Core become solid.We report TEM image of Core-Shell particle.