[20a-PA1-1~11] 7 Beam Technology and Nanofabrication (Poster)

▲ [20a-PA1-3] Fabrication of oxide nanofiber tipped cantilever as a substrate for cross sectional TEM

Kouki Watanabe¹, Subash Sharma¹, Mona Araby¹, Masahide Shima¹, Takumi Harada¹, Saufi Rosmi², Golap Kalita¹, Masashi Kitazawa³, 〇Masaki Tanemura¹ (1.Nagoya Inst. Tech., 2.UPSI Malaysia, 3.Olympus)

Keywords:TEM, cross sectional analysis, sample preparation

Transmission electron microscopy (TEM) is a powerful tool for the material analysis. For TEM analyses, samples should be thin enough. This requirement makes the sample preparation time-consuming in general. For the cross sectional TEM (X-TEM), samples are prepared by ion milling of the mechanically polished material or by thinning the desired region of the material using a focused ion beam. In both methods, thinning process is employed after the synthesis of materials, and hence the damage to the sample induced by ion irradiation is unavoidable. Here we propose a silicon oxide nanofiber (SON) grown on a tip of a cantilever as a substrate onto which thin films are deposited for the simple, rapid and damage-free X-TEM analysis.