The 79th JSAP Autumn Meeting, 2018

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Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[20p-221C-1~15] 15.6 Group IV Compound Semiconductors (SiC)

Thu. Sep 20, 2018 1:45 PM - 6:00 PM 221C (2Ｆ_Lounge1)

Shin-Ichiro Kuroki(Hiroshima Univ.), Kazuma Eto(AIST)

1:45 PM - 2:00 PM

[20p-221C-1] Investigation on Al diffusion and sheet resistance of Al-implanted and laser-irradiated 4H-SiC

〇(M2)Shogo Muto1, Akihiro Ikeda2, Hiroshi Ikenoue1, Tanemasa Asano1 (1.Kyushu Univ., 2.Sojo Univ.)

Keywords:SiC, laser