[20p-222-1~23] 6.2 Carbon-based thin films

[20p-222-11] Bias Effects on Mechanical Properties of Ultrananocrystaline Diamond Films Deposited on Cemented Carbide Substrates by Coaxial Arc Plasma Deposition

〇Tsuyoshi Yoshitake¹, Mohamed Egiza^1,2, Kouki Murasawa^1,3, Ali M. Ali⁴, Yasuo Fukui³, Hidenobu Gonda³, Masatoshi Sakurai³ (1.Kyushu Univ., 2.Kafrelsheikh Univ., 3.OSG Corporation, 4.Al-Azhar Univ.)

Keywords:nanodiamond, bias application, coaxial arc plasma deposition

Ultrananocrystalline diamond films were deposited on cemented carbides substrates that biased negatively by coaxial arc plasma deposition. Although the negative bias is immediately compensated by the arrival of high-density positive carbon ions at the substrates, the negative bias evidently affects the deposition process and mechanical properties of the films. For example, the deposition rate is trebled by the bias application.