[20p-222-1~23] 6.2 Carbon-based thin films

△ [20p-222-16] Fabrication of Periodical N-DLC / Metal Multilayer Film for Conductive Hard Coating

〇Koki Tamekuni¹, Toru Harigai¹, Satoshi Degai¹, Tsuyoshi Tanimoto¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Haruyuki Yasui², Satoru Kaneko³, Shinsuke Kunitsugu⁴, Masao Kamiya⁵, Makoto Taki⁶ (1.Toyohashi Univ. Technol, 2.Ind. Res. Inst. of Ishikawa, 3.Kanagawa Inst. of Ind. Sci. Technol., 4.Ind. Technol. Cent. of Okayama, 5.Itoh Opt. Ind. Co., Ltd, 6.Onward Ceram. Coat. Co., Ltd)

Keywords:Diamond-Like Carbon, multilayer, conductive hard coating

In this research, in order to realize a low electrical resistance hard film, a multilayer film combining a nitrogen coating DLC film with a tubgsten film was prepareted. The multilayer film were alternately stacked at intervals of 50 nm, and the total number of layers was 8. The film was abraded using a spherical polishing method, and wear marks were observed with an optical microscope. In addition, the electrical resistivity in the film thickness direction was calculated with a source meter. The N-DLC / W multilayer film had a larger substrate exposed diameter than the single layer film, and the electrical resistance against polishing was reduced. On the other hand, the electrical resistivity was about half of the single layer film.