[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-12] [Young Scientist Presentation Award Speech] First-principles-based prediction of the local structures damaged by plasma exposures (2)

〇Yuuta Yoshikawa¹, Koji Eriguchi¹ (1.Kyoto Univ.)

Keywords:plasma-induced damage, first-principles simulation, density-of-state

The electronic structure change after plasma exposure in representative materials used in electronic devices is investigated by a first-principles approach. In addition, we consider the difference in electronic state result from the defect density by using various cell sizes.