Dielectric Function of Oxide Film from Analysis of Energy Loss Signals for Photoelectrons

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Fri. Sep 21, 2018 9:00 AM - 11:30 AM 145 (Reception Hall)

Osamu Nakatsuka(Nagoya Univ.), Ishizaki Hiroki(Saitama Inst. of Tech.)

10:00 AM - 10:15 AM

〇Akio Ohta¹, Mitsuhisa Ikeda¹, Katsunori Makihara¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)

Keywords:XPS, Dielectric Function