[21a-PA3-1~20] 13.8 Optical properties and light-emitting devices

[21a-PA3-4] Syntheses and evaluation of α-Zn₂SiO₄ thin films

〇Kentaro Matsuzaki¹, Hikaru Saito¹, Satoshi Hata¹, Kosuke Watanabe¹, Miki inada¹ (1.Kyushu Univ.)

Keywords:Willemite, Cathodoluminescence, Microscopy

Zn₂SiO₄ obtained by annealing ZnO on Si₃N_4.It has been reported that the film is a light emitting film with excellent flatness. It has also been reported that the emission wavelengths of Zn₂SiO₄ differ depending on the phase. Therefore, in this study, we investigated the dependence of the phase and structure of the formed film on the heat treatment condition for the purpose of controlling the light emission characteristics of Zn₂SiO₄ film. By subjecting the multilayer thin film to heat treatment at 900 ° C. or higher,it is possible a single color of α phase light emitting thin film can be easily obtained.