[21p-135-1~16] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21p-135-1] Evaluation of reliability using the dielectric polarization characteristic in Pulse Photoconductive Measurement

〇Shotaro Kuzukawa¹, Hiroki Matsuyama¹, Narumi Abe¹, Yuki Kumagae¹, Yuichiro Shimazu¹, Kotaro Nagatomo², Shunsuke Nakamura², Yusuke Nakayama², Kazuhiro Kobayashi¹, Hiroshi Kubota¹, Takeshi Hashishin¹, Masao Yoshioka² (1.GSST Kumamoto Univ., 2.Faculty of Technology Kumamoto Univ.)

Keywords:evaluation, insulator, non-destructive

We propose Pulse Photoconductivity Method (PPCM) as an evaluation method of insulators. PPCM measures the dielectric polarization characteristic of the insulator and calculates the electrical conductivity. Therefore, in this method, it is necessary to verify whether the measurement result has been obtained from the polarization characteristic of the insulator. In this paper, we report a method to verify reliability in PPCM measurement by analyzing polarization characteristics.