[21p-135-1~16] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21p-135-9] Temperature Influence on Adsorption and Desorption of Organic Molecules on Silicon
Surface

〇Kenta Hori¹, Zhou Yifan¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)

Keywords:Organic matter, Adsorption and desorption, Temperature

Temperature influence on desorption of diethyl phthalate (DEP) on silicon sufrace was evaluated.