The 79th JSAP Autumn Meeting, 2018

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[21p-145-1~14] 13.3 Insulator technology

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Keisuke Yamamoto(Kyushu Univ.), Yasushi Hotta(Univ. of Hyogo)

1:15 PM - 1:30 PM

[21p-145-1] [Young Scientist Presentation Award Speech] Thermal oxidation kinetics of Ge under high O2 pressure

Xu Wang1, Tomonori Nishimura1, Takeaki Yajima1, Akira Toriumi1 (1.Tokyo Univ.)

Keywords:Germanium, thermal oxidation