[Young Scientist Presentation Award Speech] Thermal oxidation kinetics of Ge under high O<sub>2</sub> pressure

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Keisuke Yamamoto(Kyushu Univ.), Yasushi Hotta(Univ. of Hyogo)

1:15 PM - 1:30 PM

〇Xu Wang¹, Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.Tokyo Univ.)

Keywords:Germanium, thermal oxidation