[21p-145-1~14] 13.3 絶縁膜技術

▲ [21p-145-1] [Young Scientist Presentation Award Speech] Thermal oxidation kinetics of Ge under high O₂ pressure

〇Xu Wang¹、Tomonori Nishimura¹、Takeaki Yajima¹、Akira Toriumi¹ (1.Tokyo Univ.)

キーワード：Germanium, thermal oxidation