The 79th JSAP Autumn Meeting, 2018

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[21p-145-1~14] 13.3 Insulator technology

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Keisuke Yamamoto(Kyushu Univ.), Yasushi Hotta(Univ. of Hyogo)

1:45 PM - 2:00 PM

[21p-145-3] Fabrication and Evalution of GeO2/Ge structure by CVD method

〇Yasuyuki Katsuno1, Amu Sato1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.Tokyo Univ. of Agri. & Tech.)

Keywords:semiconductor