Shungo Tanimoto

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P6 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[19p-P6-1~17] 6.4 Thin films and New materials

1:30 PM - 3:30 PM

[19p-P6-4] Electrical Characteristics and Microstructure for MoSi₂-Si Composite Thin Films Deposited by RF Magnetron Sputtering

〇Shungo Tanimoto¹, Yuuki Sato¹, Tadashi Ohachi¹, Shinzo Yoshikado¹ (1.Doshisha Univ.)