Masanori Shinohara

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:30 PM - 3:30 PM P4 (P)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics（Poster）

[20p-P4-1~40] 8 Plasma Electronics（Poster）

1:30 PM - 3:30 PM

[20p-P4-5] Plasma enhanced chemical vapor deposition process using an ether as a source, monitored with IR spectroscopy

〇Masanori Shinohara¹, Taisuke Tominaga¹, Hayato Shimomura¹, Takeshi Ihara¹, Yoshihito Yagyu¹, Tamiko Ohshima¹, Hitoharu Kawasaki¹ (1.NIT Sasebo College)

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