Masahiro Sugiyama

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 12:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-C204-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:45 AM - 12:00 PM

△ [20a-C204-11] Dependence of Microwave Hydrogen Plasma Treatement on S/Mo Ratio of MoS₂ Film Grown by Chemical Vapor Deposition

〇Masahiro Sugiyama¹, Yuta Nabuchi¹, Akihisa Ogino¹ (1.Shizuoka Univ.)