Shotaro Kuzukawa

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:00 PM - 3:45 PM B301 (53-301)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18p-B301-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:15 PM - 2:30 PM

[18p-B301-5] Evaluation of trace metal contamination in SiO₂ by Pulse Photoconductivity Method

〇(M1)Shotaro Kuzukawa¹, Takahiro Ono¹, Tatsuro Kawano¹, Hiroki Matsuyama¹, Kazuhiro Kobayashi¹, Hiroshi Kubota¹, Takeshi Hashishin¹, Masao Yoshioka², Moriya Miyashita³, Takahiro Maeta³ (1.GSST Kumamoto Univ., 2.Faculty of Technology Kumamoto Univ., 3.GlobalWafers Japan)

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