Takuma Yagi

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P8 (P)

Poster presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[17p-P8-1~24] 13.5 Semiconductor devices and related technologies

1:30 PM - 3:30 PM

[17p-P8-1] Characteristic control buried-SiGe-channel p-MOSFET formed by sputter epitaxy

〇Takuma Yagi¹, Takahiro Tsukamoto¹, Nobumitsu Hirose², Akifumi Kasamatsu², Toshiaki Matsui², Yosiyuki Suda¹ (1.Tokyo Univ. of Agric.& Technol., 2.National Inst. of Inf. and Commun. Technol.)

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