Takashi Matsukawa

→ Search for Takashi Matsukawa in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-C101-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:15 AM - 10:30 AM

[19a-C101-5] Damageless Doping Technology for FinFETs by Spin-Coated PDS

〇Takashi Matsukawa¹, Takahiro Mori¹, Yoshihiro Sawada², Yohei Kinoshita², Yongxun Liu¹, Meishoku Masahara¹ (1.AIST, 2.Tokyo Ohka Kogyo)