Nobuaki Mino

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:15 AM - 10:30 AM

△ [17a-C101-4] Evaluation of Nanostructure in Poly-Si Grain by Raman Spectroscopy (Ⅲ)

〇(B)Nobuaki Mino¹, Ryo Yokogawa^1,3, Takahiro Suzuki¹, Kazuya Takahashi², Kazuhiko Komori², Tamotsu Morimoto², Naomi Sawamoto¹, Atsushi Ogura¹ (1.Meiji Univ., 2.Tokyo Electron Technology Solutions Ltd., 3.JSPS Research Fellow)

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