Yongxun Liu

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:15 AM - 12:15 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:00 AM - 11:15 AM

[20a-C101-7] Fabrication of Submicron Gate Minimal SOI-CMOS Using Gate-First Process

〇Yongxun Liu¹, Kazushige Sato², Hiroyuki Tanaka^1,2, Kazuhiro Koga², Sommawan Khumpuang^1,2, Masayoshi Nagao¹, Takashi Matsukawa¹, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

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