Yuri Mizukawa

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:45 AM - 10:00 AM

[17a-C101-2] Real-time Observation of Crystalline Growth Using Atmospheric Pressure Thermal-Plasma-Jet and Cylindrical Rotation Stage Combined with High-speed Camera

〇Yuri Mizukawa¹, Wataru Nakano¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)