Junichi Nomoto

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 4:00 PM - 6:00 PM P11 (P)

Poster presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-P11-1~31] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:00 PM - 6:00 PM

[19p-P11-6] The influence of argon gas on the spatial distribution of electrical and structural properties in transparent conductive Al-doped ZnO polycrystalline films deposited by magnetron sputtering

〇Junichi Nomoto¹, Hisao Makino¹, Tetsuya Yamamoto¹ (1.Research Inst. Kochi Univ. Tech.)