Hiromu Harada

→ Search for Hiromu Harada in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:00 AM - 10:15 AM

[17a-C101-3] Fabrication of high mobility n-type Ge film by Atmospheric Pressure Micro-Thermal-Plasma-Jet

〇Hiromu Harada¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Graduate School of Advanced Sciences of Matter, Hiroshima University)