Mitsuhisa Hiraiwa

→ Search for Mitsuhisa Hiraiwa in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:45 AM - 11:00 AM

[17a-C101-6] Effect of channel impurity doping on poly-Si TFTs with Multi-Line-Beam CLC

〇Mitsuhisa Hiraiwa¹, Thuy Nguyen Thi¹, Shin-Ichiro Kuroki¹ (1.Hiroshima Univ.)