Yuto Nakazawa

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:00 AM - 12:30 PM F206 (61-206)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[17a-F206-1~13] 13.3 Insulator technology

9:15 AM - 9:30 AM

[17a-F206-2] Evaluation of the depth profile of charge density in SiO₂ film by C-V measurement in HF solution

〇Yuto Nakazawa¹, Ryu Hasunuma¹ (1.Tsukuba Univ.)