Takashi Noguchi

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 5:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-C101-1~6] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

5:00 PM - 5:15 PM

[17p-C101-5] Low Temperature Crystallization using BLDA for PECVD Si films without de-hydrogenation

〇Takashi Noguchi¹, Yuya Ishiki¹, Futa Gakiya¹, Tatsuya Okada¹, Taro Morimura², Atsushi Ota², Yasushi Nishikata² (1.Univ.f the Ryukyus, 2.ULVAC Inc.)