Yuya Yamashita

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:15 PM - 6:30 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[17p-C204-1~20] 8.1 Plasma production and diagnostics

1:45 PM - 2:00 PM

△ [17p-C204-3] Diagnostics of microwave discharge low-pressure argon plasma by multi-optical emission line analysis based on collisional-radiative model

〇(M2)Yuya Yamashita¹, Fuminori Yamazaki¹, Atsushi Nezu^2,3, Hiroshi Akatsuka^3,1 (1.Sch. Eng., Tokyo Tech, 2.Tech. Dept., Tokyo Tech, 3.IIR, Tokyo Tech)

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