Hiroki Oba

→ Search for Hiroki Oba in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:45 PM - 6:15 PM F206 (61-206)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[17p-F206-1~17] 13.3 Insulator technology

4:15 PM - 4:30 PM

[17p-F206-10] Fabrication and Evaluation of HfO₂/Si Structure by Chemical Oxidation Method on Metal Hf/Si Structure

〇Hiroki Oba¹, Riho Nonaka¹, Yoshitaka Iwasaki¹, Tomo Ueno¹ (1.Tokyo Univ. of Agri. & Tech.)