Ken Iyoda

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 6:00 PM P12 (P)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[17p-P12-1~27] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[17p-P12-19] Characterization of traps in He-implanted n-GaN

〇Ken Iyoda¹, Yutaka Tokuda¹, Kenji Shiojima², Joji Ito³, Takahide Yagi³ (1.Aichi Inst. of Tech, 2.Fukui Univ., 3.SHI-ATEX Co, Ltd.)