Hirofumi Niijima

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P7 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

△ [17p-P7-11] A Study on Brownian Noise Evaluation of High-sensitivity MEMS Accelerometers

〇Hirofumi Niijima¹, Shota Otobe¹, Motohiro Takayasu¹, Daisuke Yamane¹, Toshifumi Konishi^1,2, Teruaki Safu², Hiroyuki Ito¹, Hiroshi Toshiyoshi³, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT, 3.Univ. of Tokyo)

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