Jun Owatari

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P7 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

[17p-P7-21] CNM embedded in Co/Al₂O₃/SiO₂ substrate for LSI submicron hole using supercritical ethanol

〇(B)Jun Owatari¹, Yuki Matsumae¹, Yoshio Uhara¹, Masatoshi Ito¹, Shigeru Saito¹ (1.TUS)