Nithi Atthi

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:00 PM - 4:15 PM B401 (53-401)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20p-B401-1~12] 7.3 Micro/Nano patterning and fabrication

1:15 PM - 1:30 PM

▲ [20p-B401-2] Fabrication of PDMS with 3D Microstructure for Antibacterial Antifouling Applications

〇Nithi Atthi¹, Preeyawis Na Ubol², Wisaroot Sripumkhai¹, Pattaraluck Pattamang¹, Rattanawan Meananeatra¹, Jakrapong Supadech¹, Wutthinan Jeamsaksiri¹, Charndet Hruanun¹ (1.Nat.Elec.&Com.Tech.Center, 2.Nat.Metal&Mat.Tech.Center)

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P7 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

▲ [17p-P7-3] Improvement of Poly-Si Wet Etching for Fusion Bonding of MEMS Pressure Sensor

Jirawat Jantawong¹, 〇Nithi Atthi¹, Apirak Pankiew¹, Chana Leepattarapongpan¹, Kathirgamasundaram Sooriakumar², Wutthinan Jeamsaksiri¹, Charndet Hruanun¹ (1.Nat.Elec.&Com.Tech.Center, 2.IR sensor&systems)

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